Products
  • MHS Solutions-Frame Cassette Load Port
    8”/12”Frame ApplicationPLC based self controlFrame mapping in cassette (Optional).....
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  • MHS Solutions-Wafer Cassette Load Port
    8”/12”Wafer ApplicationWafer cassette / FOUP / FOSBWafer mapping in cassettePLC based self control.....
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  • MHS Solutions-Wafer Pre-Aligner
    4”-8”/8”-12”Wafer ApplicationConversional vacuum wafer discNon-contact beam sensor usingThinner wafer handling.....
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  • MHS Solutions-RTH Robot
    Single Arm 8”-12”Wafer ApplicationVacuum EndeffectorBernoulli EndeffectorGripper EndeffectorCavity Endeffector0°-180°Flip armAtmosphere TypeVacuum Type.....
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  • MHS Solutions-SCARA Robot
    Single Arm 8”/12”Wafer ApplicationVacuum EndeffectorBernoulli EndeffectorGripper EndeffectorCavity Endeffector0°-180°Flip armAtmosphere TypeVacuum Type.....
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  • MHS Solutions-RTH Robot
    Dual Arm 4”-8”Wafer ApplicationVacuum EndeffectorBernoulli EndeffectorGripper EndeffectorCavity EndeffectorAtmosphere TypeVacuum Type.....
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  • MHS Solutions-RTH Robot
    MHS Solutions-RTH RobotSingle Arm 4” -8”Wafer ApplicationVacuum EndeffectorBernoulli EndeffectorGripper EndeffectorCavity Endeffector0°-180°Flip armAtmosphere TypeVacuum Type.....
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